3-Dimensional Microorifice Fabricated Utilizing Single Undercut Etching Process for Producing Ultrasmall Water and Chitosan Droplets

Photoelectrochemical undercut etching for fabrication of GaN microelectromechanical systems

The authors have developed a wet, band-gap-selective, photoelectrochemical etching process capable of producing cantilever microelectromechanical systems from InGaN/GaN heterostructures. Fabricated cantilevers were successfully actuated, and resonance spectra were measured. The as-grown strain gradient in the GaN film was found to relax upon removal, resulting in upward curvature of the cantile...

Calculation of Evaporation Rate of a Droplets Cluster and Conceptual Design of a Structure Utilizing Water Droplets for Evaporation

It has been known that workers of a honey bee colony bring water droplets into their hive, spraying it on the frames and brood cells, and fanning their wings when ambient temperature rises higher than appropriate. Meanwhile several species from Namibian beetles demonstrate unique water harvesting strategies from the morning fog via the bumps and troughs above their elytra, where water droplets ...

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fu...

Three-Dimensional Simulation of Anisotropic Wet Chemical Etching Process

In this paper, we present result on the development of a simulation tool for the three-dimensional anisotropic wet chemical etching of bulk silicon etching or bulk micromaching. As a test of our simulation tool, we present several simulation results. Several simulation results demonstrate our simulation tool which is quite efficient for the design and development of MEMS device structure. The d...

STSetch2 Profile Characterization - Undercut Investigation for Silicon Trench Etching in STSetch2